Microelectronic test pattern NBS-3 for evaluating the resistivity-dopant density relationship of silicon
Martin G Buehler
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“Microelectronic test pattern NBS-3 for evaluating the resistivity-dopant density relationship of silicon” by Martin G Buehler: a public-domain book in…
Catalogue details
- Author
- Martin G Buehler
- Category
- General & Other
- Language
- English
- Source
- HathiTrust